| Watlow Gordon's new RF probe thermocouple
is designed to be used in the generation of plasma. Radio frequency energy can cause
serious temperature measurement errors through radiation or conduction. Traditional
sensors are ineffective against the induced noise associated with such environments. The
RF probe is ideal for reading temperatures through such interference as seen in
semiconductor wafer processing and etching.
 The RF probe, certified to conform to NIST, is designed with a combination of
high performance materials. The sensor tip is made from a high thermal conductivity
material to allow for quick results, and TeflonŽ electrically isolates the sensor. The
junction is supported by high density ceramic.
With a 5/16-18 UNC stainless steel
mounting bolt and flexible lead wire with eyelets, the unit can easily be connected with
other instruments. The probe is easily integrated into a platen or pedestal, and can be
customized to fit the customer's exact specifications.
|
